High-Speed
Chromatic confocal sensors offer high-speed, non-contact measurement with exceptional accuracy across a wide range of surfaces. They provide precise depth and thickness measurements, even on transparent or highly reflective materials. Their flexibility makes them true all-rounders.
Point Sensors
Resolution: down to 3 nm
Speed: up to 66,000 datapoints / sec
Features: Multiple sensor heads in one system
Resolution: down to 8 nm
Speed: up 4,000 datapoints / sec
Features: Interchangeable sensor heads
Resolution: down to 25 nm
Speed: up to 10,000 datapoints /sec
Features: Interchangeable sensor heads
Available Models
Point Sensor
Measuring rate
10 - 66 kHz
Light source
LED
| Sensor Head | Measuring range | Working distance | Axial Resolution | Lateral resolution* | Measurement angle |
|---|---|---|---|---|---|
| P-CHR-100 | 100 µm | 1.4 mm | 2 nm | 1,8 µm | +/- 45° |
| P-CHR-300 | 300 µm | 4.5 mm | 3 nm | 2.5 µm | +/- 30° |
| P-CHR-350 | 350 µm | 8.4 mm | 3 nm | 2.5 µm | +/- 20° |
| P-CHR-400 | 400 µm | 15 mm | 3 nm | 2 µm | +/- 45° |
| P-CHR-600 | 600 µm | 6.5 mm | 3 nm | 2 µm | +/- 30° |
| P-CHR-1000 | 1000 µm | 19 mm | 4 nm | 1.8 µm | +/- 45° |
| P-CHR-1200 | 1200 µm | 9.3 mm | 4 nm | 5 µm | +/- 30° |
| P-CHR-1200 C | 1200 µm | 3 mm | 4 nm | 7.5 µm | +/- 14° |
| P-CHR-2000 LWD | 2000 µm | 61 mm | 6 nm | 6 µm | +/- 15° |
| P-CHR-2000 | 2000 µm | 14 mm | 6 nm | 6 µm | +/- 30° |
| P-CHR-3000 | 3000 µm | 23 mm | 8 nm | 6 µm | +/- 30° |
| P-CHR-5000 | 5000 µm | 30 mm | 12 nm | 12.5 µm | +/- 15° |
| P-CHR-6000 | 6000 µm | 53 mm | 14 nm | 7 µm | +/- 30° |
| P-CHR-8000 | 8000 µm | 36 mm | 18 nm | 15 µm | +/- 15° |
| P-CHR-10000 | 10000 µm | 70 mm | 22 nm | 12 µm | +/- 20° |
| P-CHR-12000 | 12000 µm | 54 mm | 26 nm | 15 µm | +/- 15° |
| P-CHR-25000 | 25000 µm | 77 mm | 52 nm | 12.5 µm | +/- 15° |
| P-CHR-38500 | 38500 µm | 101 mm | 79 nm | 17 µm | +/- 12° |
*systems offer a minium step size of 0.5 µm
Interferometric Sensor Heads
| Sensor head | Measuring range | Working distance | Lateral resolution | Measurement Angle |
|---|---|---|---|---|
| P-VIS-INT | 3 – 180 µm | 27 mm | 20 µm | +/- 5° |
| P-VIS-INT C | 3- 180 µm | 10.6 mm | 6.5 µm | +/- 10° |
| P-VIS-INT EC | 3 – 180 µm | 18.1 mm | 25 µm | +/- 5° |
Compact Point Sensor
Measuring rate
4 kHz
Light source
LED
| Sensor Head | Measuring range | Working distance | Axial Resolution | Lateral Resolution* | Measurement angle |
|---|---|---|---|---|---|
| C-CHR-200 | 200 µm | 4.8 mm | 8 nm | 1.7 µm | +/- 45° |
| C-CHR-500 | 500 µm | 12.7 mm | 20 nm | 2.5 µm | +/- 45° |
| C-CHR-1000 | 1000 µm | 15.5 mm | 40 nm | 2.5 µm | +/- 28° |
| C-CHR-4000 | 4000 µm | 37.5 mm | 160 nm | 4 µm | +/- 20° |
| C-CHR-10000 | 10000 µm | 71.5 mm | 400 nm | 8 µm | +/- 14° |
*systems offer a minium step size of 0.5 µm
Mini Point Sensor
Measuring rate
4 - 10 kHz
Light source
LED
| Sensor Head | Measuring range | Working distance | Axial resolution | Lateral resolution* | Measurement angle |
|---|---|---|---|---|---|
| P-CHR-M 600 | 600 µm | 6.5 mm | 25 nm | 3 µm | +/- 30° |
| P-CHR-M 1100 | 1100 µm | 15 mm | 45 nm | 5 µm | +/- 25° |
| P-CHR-M 4000 | 4000 µm | 37.5 mm | 180 nm | 8 µm | +/- 20° |
| P-CHR-M 10000 | 10000 µm | 69 mm | 400 nm | 16 µm | +/- 14° |
*systems offer a minium step size of 0.5 µm
Line Sensors
Resolution: down to 20 nm
Speed: up to 1.15 million datapoints /sec
Features: Interchangeable sensor heads in addition with quick lens change
Resolution: down to 50 nm
Speed: up to 36 million datapoints /sec
Features: Interchangeable sensor heads
Available Models
Linesensor 1
Measuring rate
2 - 5 kHz
Light source
LED
Measurement points per line
192
| Sensor head | Measuring Range | Working distance | Axial Resolution | Measurement angle | Line length | Pitch* |
|---|---|---|---|---|---|---|
| L-CHR 200 | 200 µm | 5.3 mm | 20 nm | +/- 44° | 960 µm | 5 µm |
| L-CHR 500 | 500 µm | 12 mm | 50 nm | +/- 38° | 1430 µm | 7.5 µm |
| L-CHR 500 LL | 500 µm | 23.3 mm | 70 nm | +/- 20° | 4500 µm | 23.6 µm |
| L-CHR 950 | 950 µm | 18.5 mm | 80 nm | +/- 33° | 1910 µm | 10 µm |
| L-CHR 2000 | 2000 µm | 27.5 mm | 250 nm | +/- 11° | 8300 µm | 43.5 µm |
| L-CHR 2300 | 2300 µm | 15.6 mm | 200 nm | +/- 33° | 1560 µm | 8 µm |
| L-CHR 2450 | 2450 µm | 33 mm | 200 nm | +/- 30° | 3323 µm | 17.4 µm |
| L-CHR 3900 | 3900 µm | 36.4 mm | 320 nm | +/- 20° | 4800 µm | 25 µm |
Linesensor 2
Measuring rate
7.9 – 18.3 kHz
Light source
Laser Diodes
Measurement points per line
1200
| Sensor head | Measuring Range | Working distance | Axial Resolution | Measurement angle | Line length | Pitch |
|---|---|---|---|---|---|---|
| L-CHR2 600 | 680 µm | 9.2 mm | 50 nm | +/- 50° | 2.36 mm | 1.97 µm |
| L-CHR2 2500 | 2500 µm | 27 mm | 200 nm | +/- 33° | 4.40 mm | 3.69 µm |
| L-CHR2 10000 | 10600 µm | 36.6 mm | 800 nm | +/- 13° | 11.9 mm | 9.90 µm |
Linesensor 2 Pro
Measuring rate
7.9 – 36 kHz
Light source
Laser Diodes
Measurement points per line
1200
| Sensor head | Measuring Range | Working distance | Axial Resolution | Measurement angle | Line length | Pitch |
|---|---|---|---|---|---|---|
| L-CHR2 1250 Pro | 1250 µm | 13 mm | 100 nm | +/- 45° | 4.50 mm | 3.75 µm |
| L-CHR2 2400 Pro | 2400 µm | 21.4 mm | 200 nm | +/- 38° | 8 mm | 6.67 µm |
| L-CHR2 3000 Pro | 3000 µm | 40 mm | 250 nm | +/- 15° | 20 mm | 16.67 µm |
| L-CHR2 5000 Pro | 5000 µm | 42 mm | 400 nm | +/- 25° | 11.9 mm | 9.92 µm |
Easy to set
The chromatic confocal sensors are fully integrated in our software, allowing you to access all sensor settings or switching between simultaneously installed sensor heads with just a few clicks. With features like autofocus or auto-lamp adjustment and setup are straightforward, ensuring optimal settings.
Working Principle
This advanced measurement technology offers precise distance measurements using a polychromatic light source.
Measurement Examples
Other Sensors
Confocal Microscope
With a resolution down to 1 nanometer best suited for small step heights and features.
General
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Germany