Applications

Analysis for a wide range of applications.

Warp, Bow, Parallelsim and more

R-Parameter (2D), S-Parameter (3D) and more

Seating-Plane, Regression-Plane and more

2D and 3D Step Height and more

Thickness, Volume and more

Thickness Variation (TTV, LTV), Position Top to Bottom, and more

Measure Flatness, Bow, Warp and more of substrates, wafer or any other sample.

Measure R-parameters (e.g. Ra, Rz) in 2D or S-parameters (e.g. Sq, Smax) in 3D.

Measure coplanarity with seating or regression plane, local heights of pins, pads, bumps, connectors and more.

Measure and analyze heights on a global or local scale, from microns down to nanometers.

Measure the thickness of transparent layers or the top surface.

Absolute thickness, thickness variations (TTV, LTV), parallelism or compare positions of features from top to bottom surface.

Need more information about a specific application?