Height

Measure step heights from micron to nanometer

(Step) Heights

From small step heights on structured wafers to precise height differences on mechanical parts, our systems are the ideal choice for achieving micron or nanometer accuracy.

HEIGHT

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Height Analysis

3D (Step) Height

Measure step heights in 3D on single or multiple areas, analyzing heights or flatness relative to specified reference areas.

2D Height

Measure 2D profiles for immediate scan results in seconds.

Local Height

Examine each area of interest or feature in relation to its local surroundings. Automatically detect your features based on height or intensity and create automated reference areas. Alternatively, use data operations to compensate for substrate warpage and more.

Advanced Dataoperations and Analysis

Filter your measurement data to get rid of contamination influencing your measurement results (e.g. median, matrix smooth) or use advanced analysis like sphere or aspheric lens analysis to determine the center of the lens for a specific conic constant.

Automate your Height measurements with ASCAN

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Non-Contact Measurement

We offer a wide range of sensor technologies designed to meet your unique requirements, including the option for multi-sensor configurations within a single system.

Chromatic Confocal

Chromatic confocal sensors can capture millions of measurement points per second with z-resolution as fine as 3 nanometers. They are ideal for fast measurements and work effectively on nearly any material, whether highly reflective or low-reflective. This makes them a top choice for fast, accurate measurements over small and large surface areas.

Confocal Microscope

Measure and analyze heights with resolutions down to 1 nanometer. Easily switch between different field of view of views and resolutions using an automatic objective turret for seamless objective changes in manual and automatic mode.

3D White Light Interferometer

White Light Interferometry (WLI) is highly effective for measuring even smaller heights due to its exceptional Z-resolution, reaching as fine as 0.1 nanometers. This capability allows the WLI to detect minute height variations.

Examples

The metrology systems can be used to measure a wide variety of products and samples for coplanarity. A breif selection.

Wafer

Identify even the smallest variations in step heights on wafers. This level of detail supports stringent quality requirements and helps maintain consistency and reliability in high-precision applications.