Advanced Metrology
for Fab & Lab
Explore the micro- and nanospace to perfect
every detail of your product and process.
Smarter. Faster. Future-ready.
cyberTECHNOLOGIES is redefining semiconductor metrology – combining precision-engineered hardware with intelligent software for unmatched performance in both front-end and back-end processes.
From wafer-level to advanced packaging, our systems deliver nano-resolution data where it matters most. Metrology solutions for a wide range of semiconductor applications, including:
Front-End: Wafer Bow/Warp, Thickness Variation (TTV, LTV), Thin Film Metrology
Back-End: Advanced Packaging, Bumps, Wirebond, Thermal Warpage
Panels: Warpage, Thickness, TGV/TSV, Position Accuracy, Dimensional Measurements
…and much more.
in research, development and production.
High-performance sensor technologies
Our systems offer a wide range of non-contact sensors in a single or multi-sensor setup to enable various applications.
From high-speed chromatic confocal sensors with up to 36 million points per second to confocal microscopes and 3D white light interferometers with (sub-)nanometer resolution. Interferometers for thickness and reflectometer for thin-film measurements down to 10 nanometers and a 235MP-camera for fast ultra-high-resolution lateral measurements.
Accuracy begins with stability
Customizable setup tailored to your needs
Applications
Our metrology systems are used for a wide range of applications requiring micrometer or nanometer accuracy. A brief selection:
Sophisticated Software
Our software offers manual analysis tools as well as fully automated metrology solutions and advanced production environment software. Software development is one of our core competences to ensure optimal performance and maximum flexibility.
Manual measurement and analysis software. Featuring over 500 built-in analyses and data operations. Designed to help you focus on what matters most to you with ease.
The automation software for your measurement and analysis. Easily create measurement programs with just some clicks. Production ready and optional with SECS/GEM support.
Production software for our fully automized metrology systemes (AL-series) including sample handling. Optimized for cleanroom environments with touch control, great overview of measurements, results and systems status and optional SECS/GEM support.
Service & Support
Need assistance? Contact our experts for support with your measurement system or any questions regarding your application and new metrology challenges.
Latest News
General
cyberTECHNOLOGIES GmbH
Georg-Kollmannsberger-Straße 3
85386 Eching-Dietersheim
Germany