CT 450G
Advanced Metrology System for versatile production applications or large and heavy parts
Measurement and Analysis Modes
Manual / Automated
Measurement Area
450 x 450 mm²
Example Use-Cases
Probe cards, thermal warpage measurements, conveyor-based applications or for large & heavy parts
Metrology Advanced
The CT 450G is a high-resolution metrology system for larger parts, probe cards or thermal warpage measurements with an optional available heating chamber or conveyor-based applications.
Made to Measure
The CT-Series offers a uniquely versatile platform, designed to seamlessly adapt to a wide range of metrology applications. With customizable configurations tailored to your exact needs, it guarantees precise control over your products and processes.
For a wide range of applications in production and R&D. Choose from five optical sensor technologies for high-resolution down to 0.1 nanometer or high-speed measurements with up to 36 million datapoints per second. Add great flexibility with a combination of multiple sensors and objectives in one single system.
The CT 450G is built on a robust gantry platform, offering exceptional flexibility for handling large samples and enabling various setups and ensures precise movement across the entire 450 x 450 mm² travel range. Whether with integrating heating chambers, conveyors or custom configurations, the CT450G adapts seamlessly to meet your unique requirements.
The system includes an automated Z-axis for adjusting to different sample heights, offering autofocus functionality and a range extender to measure heights beyond the sensor’s standard range. The Z-axis on the CT 450G is available in 100, 150, or 200 mm sizes.
Focus on what matters. The system features a built-in camera with multiple magnification options, allowing you to easily navigate on your samples or choose the sensor’s scanning area in live view. Additionally, the camera enables quick and automated fiducial alignment.
Available Sensors
Flexible high-speed measurements on almost any material with a z-resolution down to 3 nm.
Thickness measurement with a resolution down to 1 nm.
Measure step heights or features with a z-resolution down to 1 nm.
With a z-resolution of down to 0.1 nm for smooth surfaces or smallest (step) heights.
Fast and high-accurate thin film measurement down to 10 nm.
For precise and fast position and lateral measurements with up to 235 MP.
Interested in a configuration of the CT450G?
Powerful Analysis
& Automation for Production
Application Examples
Coplanarity of bumps, pads and pins
Die Tilt, Flatness and Height
(Step) Heights and Critical Dimensions
Flatness, (thermal) Warpage, Stress, Sori, Bow
Options
The modular design of the CT-series allows for seamless expansion with a variety of upgrade options. Here’s a quick glimpse of what you can add to enhance your CT 450G capabilities.
Convection Heating Chamber
Engineered for precise optical thermal warpage measurement, this system features customizable sample holders and adaptable configurations. It operates within a broad temperature range of -50° to 400°, offering rapid heating and cooling cycles. The seamlessly integrated software ensures efficient, high-accuracy data collection and analysis.
Conveyor-Link
Calibration Targets
Calibrate and certify the system anytime with ease. A wide selection of calibration targets and built-in automated procedures make the process fast and easy.
Discuss your metrology needs and applications to find the ideal configuration for you.
General
cyberTECHNOLOGIES GmbH
Georg-Kollmannsberger-Straße 3
85386 Eching-Dietersheim
Germany