Measurement and Analysis Modes
Measurement Area
Use-Case Examples
The CT 600ST is a non-contact surface measurement system designed to precisely measure both top and bottom surfaces, along with absolute thickness and thickness variations, delivering exceptional accuracy across all material types on large scale.
The CT-Series offers a uniquely versatile platform, designed to seamlessly adapt to a wide range of metrology applications. With customizable configurations tailored to your exact needs, it guarantees precise control over your products and processes.
Measure absolute thickness, thickness variations (TTV, LTV), and top and bottom surface in a single run. With dual-sided chromatic confocal sensors, the
CT 650ST achieves sub-micron accuracy. Line sensors with up to 1 million datapoints per second enable high-speed applications in production environements.
The top axis can be enhanced with additional sensors, making it ideal for various production and R&D applications. Select from five advanced optical sensor technologies and sensor combinations, offering z-resolution of up to 0.1 nanometer.
Precise lateral movement on a measurement area of up to 600 x 600 mm². Combined with a 50 nm encoder, ensures pinpoint accuracy for every measurement. Enabling precise positioning and detailed lateral measurements of features. Optionally extend the stage with an interface for your specific samples.
Focus on what matters. The system features a built-in camera with multiple magnification options, allowing you to easily navigate on your samples or choose the sensor’s scanning area in live view. Additionally, the camera enables quick and automated fiducial alignment.
Flexible high-speed measurements on almost any material with a z-resolution down to 3 nm.
Thickness measurement with a resolution down to 1 nm.
Measure step heights or features with a z-resolution down to 1 nm.
With a z-resolution of down to 0.1 nm for smooth surfaces or smallest (step) heights.
Fast and high-accurate thin film measurement down to 10 nm.
For precise and fast position and lateral measurements with up to 235 MP.
The versatile design of the T-system offers a wide range of applications thickness and double-sided measurements in production or laboratories.
The modular design of the CT-series allows for seamless expansion with a variety of upgrade options. Here’s a quick glimpse of what you can add to enhance your system’s capabilities.
Calibrate and certify the system anytime with ease. A wide selection of calibration targets and built-in automated procedures make the process fast and easy.
To ensure secure sample fixation, the system can be equipped for seamless operation and features a fully customizable design panels, wafers or other samples.
cyberTECHNOLOGIES GmbH
Georg-Kollmannsberger-Straße 3
85386 Eching-Dietersheim
Germany
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