Sensor Technologies
With a unique modular design, our systems can be customized with a wide variety of sensors and sensor combinations to perfectly match your specific requirements.
The allrounder of non-contact sensors with a resolution down to 3 nm on almost all materials for high-speed measurements with up to 36 measurement points per second.
Our interferometers provide resolution down to 1 nanometer and are primarily used for measuring thickness of materials transparent to infrared light, such as silicon, glass or transparents. With the addition of our internal reference the sensor can also be used for surface measurements.
The 3D White Light Interferometer (WLI) offers exceptional z-resolution down to 0.1 nanometer, making it ideal for measuring the smallest height differences of features or performing roughness measurements on smooth surfaces like polished wafers or mirrors. It can also be combined with our confocal microscope within a single sensor housing.
Our reflectometer (RFM) was developed for fast thin-film measurement in production environments. The sensor comes in three different models to measure thin films down to 180, 70 or even 10 nanometers.
The ultra-high-resolution camera, offering up to 235 megapixels, is the ideal solution for high-accuracy lateral measurements. It is available in a monochromatic and RGB version and can be combined with various lighting setups within our systems for enhanced versatility.
General
cyberTECHNOLOGIES GmbH
Georg-Kollmannsberger-Straße 3
85386 Eching-Dietersheim
Germany