Reflectometer

Resolution: down to 20 nm
Speed: up to 1.15 Million datapoints /sec
Features: Interchangable sensor heads

Available Models

Sensor Controller

Sensor Controller	Spectrum Range	Light Source	Max. Sample Rate	Thinnest Measurable  Coating Thickness
RFM-H1	400 - 1000 nm	Long life halogen lamp	50 Hz	180 nm
RFM-X1	200 - 1000 nm	Xenon lamp	50 Hz	70 nm
RFM-HD1	200 - 1000 nm	Halogen/Deuterium lamp	50 Hz	10 nm

Sensor Heads

Sensor Heads	Working Distance	Thickness Resolution	Repeatability	Lateral Resolution	Numerical Aperture
HS200	2.4 +/- 0.3 mm	0.01 nm	< 0.1 nm (3 Sigma)*	200 µm	0.1
HS200-ESR***	2.4 +/- 0.3 mm	0.01 nm	< 0.1 nm (3 Sigma) *	200 µm	0.1
HS100		0.01 nm	< 0.4 nm (3 Sigma)**	100 µm	0.1
HS050		0.01 nm	< 1.6 nm (3 Sigma)**	50 µm	0.1
HS025-ESR***	1310	0.01 nm	< 0.1 nm (3 Sigma)**	25 µm	0.1

* Halogen lamp, layer thickness between 250 nm and 1000 nm.
** Computed values based on smaller spot size.
*** Extended spectral range: 200-1100 nm

Software-Intergration

Gain complete control over the sensor through our software. Choose from preset materials, add new ones. Switch between sensor types to automatically move the selected sensor to the defined position – and much more. Our software is designed for effortless use of all our sensor technologies within a single system.

Working Principle

This advanced measurement technology offers precise distance measurements using a polychromatic light source.

Dark Reference

A dark reference is recorded to determine the amount of scattered light without a sample.

Layer Definition

The layer system is defined in the sensor, specifying at least a transparent and a non-transparent layer with known refractive and absorption indices.

Reference Spectrum

The distance is chromatically coded, and the optical probe, connected by a light cable, defines the measuring range and focal depth.

Relative Measurement

Thin-film measurement is relative, comparing the measured spectrum to a reference spectrum.

Thickness Calculation

The software simulates possible reflection spectra, and the one with the smallest deviation from the measured spectrum is used to determine the thickness of the transparent layers.