CT 600S
Leading accuracy on large scale
Measurement and Analysis Modes
Manual / Automated
Measurement Area
650 x 650 mm² and beyond
Use-Case Examples
Large substrates, (glass) panels, thermal warpage measurements, large and heavy parts
Made for Greater
The CT 600S is a non-contact 3D surface measurement system engineered for high-resolution measurement and analysis on areas up to 650 x 650 mm² and beyond.
Made to Measure
The CT-Series offers a uniquely versatile platform, designed to seamlessly adapt to a wide range of metrology applications. With customizable configurations tailored to your exact needs, it guarantees precise control over your products and processes.
Ideal for a variety of production and R&D applications, you can choose from five advanced optical sensor technologies. From high-speed chromatic confocal sensors capable of capturing up to 36 million measuring points per second for rapid scans on large surfaces, to ultra-high-resolution sensors measuring down to 0.1 nanometer for the finest details. Enhance flexibility by combining multiple sensors and objectives within a single system.
The CT600S is built to manage large samples and fast measurements with and XY-travel range of 650 x 650 mm² and beyond. This expansive capacity is supported by a robust granite base, which ensures stability and vibration isolation. Each axis has 50 nanometer resolution for precise positioning and high accurate lateral measurements.
The system includes an automated Z-axis for adjusting to different sample heights, offering autofocus functionality and a range extender to measure heights beyond the sensor’s standard range. The Z-axis on the CT 600S is available in 100, 150, or 200 mm sizes.
Focus on what matters. The system features a built-in camera with multiple magnification options, allowing you to easily navigate on your samples or choose the sensor’s scanning area in live view. Additionally, the camera enables quick and automated fiducial alignment.
Available Sensors
Flexible high-speed measurements on almost any material with a z-resolution down to 3 nm.
Thickness measurement with a resolution down to 1 nm.
Measure step heights or features with a z-resolution down to 1 nm.
With a z-resolution of down to 0.1 nm for smooth surfaces or smallest (step) heights.
Fast and high-accurate thin film measurement down to 10 nm.
For precise and fast position and lateral measurements with up to 235 MP.
Interested in a configuration of the CT 600S?
Powerful Analysis
& Automation for Production
Application Examples
Coplanarity and height measurement
Lateral distance and position measurement
Roughness measurement
Options
The modular design of the CT-series allows for seamless expansion with a variety of upgrade options. Here’s a quick glimpse of what you can add to enhance your system’s capabilities.
Light Curtains
Upgrade the CT600S with light curtains instead of an enclosure for easier loading and unloading. This option ensures safe operation while preventing any operator interference during measurements.
Custom Design Interfaces
The semi-automated chuck for trays and boats offers precise sample positioning, controlled either manually or directly through software. This ensures optimal alignment and accelerates measurement times for high efficiency.
Calibration Targets
Calibrate and certify the system anytime with ease. A wide selection of calibration targets and built-in automated procedures make the process fast and easy.
Convection Heating Chamber
Engineered for precise optical thermal warpage measurement, this system features customizable sample holders and adaptable configurations. It operates within a broad temperature range of -50° to 400°, offering rapid heating and cooling cycles. The seamlessly integrated software ensures efficient, high-accuracy data collection and analysis.
General
cyberTECHNOLOGIES GmbH
Georg-Kollmannsberger-Straße 3
85386 Eching-Dietersheim
Germany