Interferometer

Resolution: down to 1 nm
Speed: up to 70,000 datapoints /sec
Optional Feature: Internal Reference to switch between thickness and height mode

Available Models

Sensor Controllers

Sensor Controller	Wavelength	Smallest thickness in air	Largest thickness in air	Frequency	Axial resolution
IT 400	1310	29 µm	3200 µm	70 kHz	1 nm
IT 500	1310	38 µm	4300 µm	70 kHz	1 nm
IT RW 500	1550	44 µm	4900 µm	70 kHz	1.5 nm
IT 1000	1310	66 µm	7500 µm	70 kHz	2 nm
IT 1300	1310	87 µm	10500 µm	70 kHz	3 nm
IT 1700	1310	114 µm	12600 µm	70 kHz	4 nm
IT RW 1000	1550	57 µm	6400 µm	70 kHz	2 nm
IT DW 250	1020	15 µm	1800 µm	70 kHz	1 nm
IT DW 500	1070	29 µm	3100 µm	70 kHz	1 nm
IT DW 1000	1120	66 µm	7500 µm	70 kHz	2 nm
IT HDW 250	1020	15 µm	1800 µm	4 kHz	1 nm
IT HDW 500	1070	29 µm	3100 µm	4 kHz	1 nm
IT HTW	900 – 1200 (Halogen)	4 µm	300 µm	4 kHz	1 nm
IT LR	880	16 µm	2600 µm	66 kHz	1 nm

Sensor Heads

Sensor Head	Measuring Head 1a		Measuring head 1b			Measuring head 2 LWD
Sensor Controller	IT HTW	IT LR	IT	IT RW	IT (H)DW	IT	IT RW	IT (H)DW	IT HTW	IT LR
Working distance  [mm]	40 mm		40 mm			100 mm
Lateral resolution [µm]	30 µm	3 µm	5,5 µm	6,2 µm	3,7 µm	14 mm	16 µm	9,3 µm	75 µm	7,5 µm
Numerical aperture	0.1 (90° +/- 5°)		0.1 (90° +/- 5°)			0.045 (90° +/- 2°)

Software

Have complete control over the sensor through our software. Choose from preset materials and dispersion curves, add new ones. Switch between sensor types to automatically move the selected sensor to the defined position – and much more. Our software is designed for effortless use of all our sensor technologies within a single system.

Working Principle

This advanced measurement technology offers precise distance measurements using a polychromatic light source.

Sensors

White light or infrared sensors are used for measurement.

Reflection

Polychromatic light is projected on the material surface, and light is reflected at each layer.

Phase

Different path lengths cause a phase shift, which varies with the wavelength.

Thickness

A Fourier Transform of the pattern reveals the optical length, and dividing it by the refractive index gives the thickness.

Reliability

This technology outperforms conventional laser-based triangulation methods, offering greater reliability across various environments.

Examples

Other Sensor Technologies

3D White Light Interferometer

With a resolution down to 0.1 nanometer, this sensor is perfect for measuring the smallest step heights or surface roughness on smooth surfaces like mirrors.

Learn More