High-Speed

Chromatic confocal sensors offer high-speed, non-contact measurement with exceptional accuracy across a wide range of surfaces. They provide precise depth and thickness measurements, even on transparent or highly reflective materials. Their flexibility makes them true all-rounders.

Point Sensors

Available Models
Measuring rate

10 - 66 kHz

Light source

LED

Sensor HeadMeasuring rangeWorking distanceAxial ResolutionLateral resolution*Measurement angle
P-CHR-100100 µm1.4 mm2 nm1,8 µm+/- 45°
P-CHR-300300 µm4.5 mm3 nm2.5 µm+/- 30°
P-CHR-350350 µm8.4 mm3 nm2.5 µm+/- 20°
P-CHR-400400 µm15 mm3 nm2 µm+/- 45°
P-CHR-600600 µm6.5 mm3 nm2 µm+/- 30°
P-CHR-10001000 µm19 mm4 nm1.8 µm+/- 45°
P-CHR-12001200 µm9.3 mm4 nm5 µm+/- 30°
P-CHR-1200 C1200 µm3 mm4 nm7.5 µm+/- 14°
P-CHR-2000 LWD2000 µm61 mm6 nm6 µm+/- 15°
P-CHR-20002000 µm14 mm6 nm6 µm+/- 30°
P-CHR-30003000 µm23 mm8 nm6 µm+/- 30°
P-CHR-50005000 µm30 mm12 nm12.5 µm+/- 15°
P-CHR-60006000 µm53 mm14 nm7 µm+/- 30°
P-CHR-80008000 µm36 mm18 nm15 µm+/- 15°
P-CHR-1000010000 µm70 mm22 nm12 µm+/- 20°
P-CHR-1200012000 µm54 mm26 nm15 µm+/- 15°
P-CHR-2500025000 µm77 mm52 nm12.5 µm+/- 15°
P-CHR-3850038500 µm101 mm79 nm17 µm+/- 12°

*systems offer a minium step size of 0.5 µm

Interferometric Sensor Heads
Sensor headMeasuring rangeWorking distanceLateral resolutionMeasurement Angle
P-VIS-INT3 – 180 µm27 mm20 µm+/- 5°
P-VIS-INT C3- 180 µm10.6 mm6.5 µm+/- 10°
P-VIS-INT EC3 – 180 µm18.1 mm25 µm+/- 5°
Measuring rate

4 kHz

Light source

LED

Sensor HeadMeasuring rangeWorking distanceAxial ResolutionLateral Resolution*Measurement angle
C-CHR-200200 µm4.8 mm8 nm1.7 µm+/- 45°
C-CHR-500500 µm12.7 mm20 nm2.5 µm+/- 45°
C-CHR-10001000 µm15.5 mm40 nm2.5 µm+/- 28°
C-CHR-40004000 µm37.5 mm160 nm4 µm+/- 20°
C-CHR-1000010000 µm71.5 mm400 nm8 µm+/- 14°

*systems offer a minium step size of 0.5 µm

Measuring rate

4 - 10 kHz

Light source

LED

Sensor HeadMeasuring rangeWorking distanceAxial resolutionLateral resolution*Measurement angle
P-CHR-M 600600 µm6.5 mm25 nm3 µm+/- 30°
P-CHR-M 11001100 µm15 mm45 nm5 µm+/- 25°
P-CHR-M 40004000 µm37.5 mm180 nm8 µm+/- 20°
P-CHR-M 1000010000 µm69 mm400 nm16 µm+/- 14°

*systems offer a minium step size of 0.5 µm

Line Sensors

Available Models
Measuring rate

2 - 5 kHz

Light source

LED

Measurement points per line

192

Sensor headMeasuring RangeWorking distanceAxial ResolutionMeasurement angleLine lengthPitch*
L-CHR 200200 µm5.3 mm20 nm+/- 44°960 µm5 µm
L-CHR 500500 µm12 mm50 nm+/- 38°1430 µm7.5 µm
L-CHR 500 LL500 µm23.3 mm70 nm+/- 20°4500 µm23.6 µm
L-CHR 950950 µm18.5 mm80 nm+/- 33°1910 µm10 µm
L-CHR 20002000 µm27.5 mm250 nm+/- 11°8300 µm43.5 µm
L-CHR 23002300 µm15.6 mm200 nm+/- 33°1560 µm8 µm
L-CHR 24502450 µm33 mm200 nm+/- 30°3323 µm17.4 µm
L-CHR 39003900 µm36.4 mm320 nm+/- 20°4800 µm25 µm
Measuring rate

7.9 – 18.3 kHz

Light source

Laser Diodes

Measurement points per line

1200

Sensor headMeasuring RangeWorking distanceAxial ResolutionMeasurement angleLine lengthPitch
L-CHR2 600680 µm9.2 mm50 nm+/- 50°2.36 mm1.97 µm
L-CHR2 25002500 µm27 mm200 nm+/- 33°4.40 mm3.69 µm
L-CHR2 1000010600 µm36.6 mm800 nm+/- 13°11.9 mm9.90 µm
Linesensor 2 Pro
Measuring rate

7.9 – 36 kHz

Light source

Laser Diodes

Measurement points per line

1200

Sensor headMeasuring RangeWorking distanceAxial ResolutionMeasurement angleLine lengthPitch
L-CHR2 1250 Pro1250 µm13 mm100 nm+/- 45°4.50 mm3.75 µm
L-CHR2 2400 Pro2400 µm21.4 mm200 nm+/- 38°8 mm6.67 µm
L-CHR2 3000 Pro3000 µm40 mm250 nm+/- 15°20 mm16.67 µm
L-CHR2 5000 Pro5000 µm42 mm400 nm+/- 25°11.9 mm9.92 µm

Easy to set

The chromatic confocal sensors are fully integrated in our software, allowing you to access all sensor settings or switching between simultaneously installed sensor heads with just a few clicks. With features like autofocus or auto-lamp adjustment and setup are straightforward, ensuring optimal settings.

Working Principle

This advanced measurement technology offers precise distance measurements using a polychromatic light source.

Measurement Examples

Other Sensors

Confocal Microscope

With a resolution down to 1 nanometer best suited for small step heights and features.

Reflectometer

Developed for fast thin-film measurements down to 10 nanometers.

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